The Institute offers the Master Program in Semiconductor Technology (MPST), which comprises three tracks: Materials and Fabrication, Equipment and Facility Management, and IC Design. In addition to domestic students, the program plans to enroll 10 international students annually — admitted through the general international student recruitment process — with all instruction delivered in English, in order to foster a global outlook among students.

Program Overview: The curriculum is designed to provide comprehensive professional knowledge across all aspects of the semiconductor industry, equipping students with both foundational understanding and track-specific core competencies required for future careers, thereby enhancing their employability. The curriculum is structured into core and specialized course categories, spanning three domains: Semiconductor Materials and Fabrication, Semiconductor Manufacturing Equipment & Facility, and IC Design. The program also incorporates on-site internships at TSMC's New Talent Center (NTC), guest lectures delivered by TSMC managers and above, and coursework in artificial intelligence — all aimed at cultivating students' hands-on capabilities and broadening their awareness of emerging industry trends.